-
RecordNumber
12270
-
Title
Advanced micro & nanosystems volume 1 enabling technology for MEMS and nanodevices
-
Editor
H.baltes ,O.brand ,G.K.fedder
-
Publication
Wiley -vch verlag gmbh & co .
-
Publication Year
2004
-
Collation
440
-
ISBN
352730746X
-
Link To Document :