• RecordNumber
    12270
  • Title

    Advanced micro & nanosystems volume 1 enabling technology for MEMS and nanodevices

  • Editor
    H.baltes ,O.brand ,G.K.fedder
  • Publication
    Wiley -vch verlag gmbh & co .
  • Publication Year
    2004
  • Collation
    440
  • ISBN
    352730746X
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=12270&Field=0&DTC=11