Design test integration and Packaging of MEMS/MOEMS

RecordNumber
4053
Author
Bernard Courtois Selden B. crary Kaigham J. Gabriel
Title
Design test integration and Packaging of MEMS/MOEMS
Publication
SPIE
Publication Year
2000
Collation
616
ISBN
0819436453
Link To Document :
http://dl.iust.ac.ir/dL/search/default.aspx?Term=4053&Field=0&DTC=11

Bernard Courtois Selden B. crary Kaigham J. Gabriel