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RecordNumber
15363
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Title
Microprocesses and nanotechnology 2001 :2001 International Microprocesses and Nanotechnology Conference, October 31-November 2, 2001, Shimane, Japan : digest of papers
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Author Statement
sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device
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Publication
Business Center for Academic Societies Japan
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Publication Year
2001
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Collation
xxviii, 318 p. :ill
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Notes
4891140178 , Includes bibliographical references and index
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Subject
Microlithography , Microfabrication , Microtechnology , Nanotechnology , Microelectromechanical systems
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ADDED ENTRIES
, ,
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.I585
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LC Date
2001
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وارد کنندة اطلاعات
كيهاني فر
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Link To Document :
