RecordNumber
15570
Author
Lange, D.( Dirk)
Title
CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications
Author Statement
D. Lange, O. Brand, H. Baltes
Publication
Springer
Publication Year
2002
Collation
viii, 142 p. :ill.
Series
Microtechnology and MEMS
Notes
3540431438 , Includes bibliographical references (p. [131]-140) and index
Subject
Gas detectors , Atomic force microscopy , Levers , Metal oxide semiconductors, Complementary , Microelectromechanical systems
ADDED ENTRIES
Baltes, H.(Henry) , Brand, Oliver ,
LC Class
TK
LC Number
7875
LC CutterNumber
.L36
LC Date
2002
وارد کنندة اطلاعات
محمدي
نام فايل
IUST B29 -- B29D9