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RecordNumber
16309
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Title
Enabling technology for MEMS and nanodevices
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Author Statement
edited by H. Baltes ... [et al.]
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Publication
Wiley-Vch
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Publication Year
2004
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Collation
xii, 427 p. : illus
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Series
Advanced micro & nanosystems ;v. 1
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Notes
Includes bibliographical references and index , 352730746X
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Subject
Microelectromechanical systems , Microelectronics , Nanotechnology
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ADDED ENTRIES
Baltes, H. (Henry)
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.E53
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LC Date
2004
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وارد کنندة اطلاعات
داوري
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Link To Document :
