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RecordNumber
16844
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Author
Valiev, Kamil A'Khmetovich
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Title
The physics of submicron lithography
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Author Statement
Kamil A. Valiev
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Publication
New York Plenum Press
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Publication Year
1992
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Collation
xi, 493P., diagr
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Series
Microdevices
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Notes
Includes bibliographical references , ISBN: 0-0306-43578-0
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Subject
Physics , Ion beam lithography , X-ray lithography , Lithography, Electron beam
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LC Class
TK
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LC Number
7874
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LC CutterNumber
.V336
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LC Date
1992
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Link To Document :
