-
RecordNumber
16986
-
Author
Jaeger, Richard C.
-
Title
Introduction to microelectronic fabrication
-
Author Statement
Richard C. Jaeger
-
Publication
Addison-Wesley Pub. Co.
-
Publication Year
1988
-
Collation
xiii, 232 p. : ill. ; 24 cm
-
Series
Modular series on solid state devices, v. 5
-
Notes
Includes bibliographical references and index
-
Subject
Integrated circuits - Very large scale integration
-
LC Class
TK
-
LC Number
7874
-
LC CutterNumber
.J33
-
LC Date
1988
-
Link To Document :
