• RecordNumber
    17838
  • Author

    Duval, Pierre

  • Title

    High vacuum production in the microelectronics industry

  • Author Statement
    Pierre Duval
  • Publication
    Elsevier
  • Publication Year
    1988
  • Collation
    Xiii, 222P., illus., diags., tables
  • Series
    Plasma technology, 2
  • Notes
    Bibliography:P. 163-167
  • Subject

    Microelectronics , Vacuum - pumps , Vacuum technology

  • ADDED ENTRIES
    ,
  • LC Class
    TJ
  • LC Number
    940
  • LC CutterNumber
    .D9
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=17838&Field=0&DTC=2