Ion implantation range data for silicon and germanium device technologies

RecordNumber
17893
Author
Simith, Bernard.
Title
Ion implantation range data for silicon and germanium device technologies
Author Statement
By Bernard Smith
Publication
Learved Information
Publication Year
1977
Collation
Xviii (No paging) tables
Notes
Bibliography:P. Xviii
Subject
Semiconductors , Ion implantation
ADDED ENTRIES
TI
LC Class
TK
LC Number
7871.85
LC CutterNumber
.S65
LC Date
1977
Link To Document :
http://dl.iust.ac.ir/dL/search/default.aspx?Term=17893&Field=0&DTC=2

Simith, Bernard.