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RecordNumber
18281
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Title
Electron beam testing technology
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Author Statement
edited by John T.L. Thong
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Publication
Plenum Press
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Publication Year
1993
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Collation
xvi, 462 p. : ill. ; 26 cm
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Series
Microdevices
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Notes
0306443600 , Includes bibliographical references and index
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Subject
Scanning electron microscopes , Electron beams , Semiconductors
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ADDED ENTRIES
Thong, John T. L.
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LC Class
TK
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LC Number
7871.85
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LC CutterNumber
.E426
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LC Date
1993
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Link To Document :
