• RecordNumber
    23645
  • Title

    VLSI electronics : microstructure science

  • Author Statement
    edited by Norman G. Einspruch
  • Publication
    Academic Press , Academic Press
  • Publication Year
    1981-1993
  • Collation
    v. <1-19, 21, 23-24> : ill. ; 24 cm
  • Notes
    Includes bibliographies and indexes , Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors , Vols. 11-<16 > have imprint: Orlando : Academic Press; v. 17-<19, 21, 23-24> : San Diego : Academic Press
  • Contents
    v. 1-5. (without special titles) -- v. 6. Materials and process characterization -- v. 7. (without special title) -- v. 8. Plasma processing for VLSI -- v. 9. (without special title) -- v. 10. Surface and
  • Subject

    Integrated circuits - Very large scale integration

  • ADDED ENTRIES
    Einspruch, Norman G.
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .V56
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=23645&Field=0&DTC=2