23645

edited by Norman G. Einspruch

Academic Press , Academic Press

1981-1993

v. <1-19, 21, 23-24> : ill. ; 24 cm

Includes bibliographies and indexes , Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors , Vols. 11-<16 > have imprint: Orlando : Academic Press; v. 17-<19, 21, 23-24> : San Diego : Academic Press

v. 1-5. (without special titles) -- v. 6. Materials and process characterization -- v. 7. (without special title) -- v. 8. Plasma processing for VLSI -- v. 9. (without special title) -- v. 10. Surface and

Einspruch, Norman G.

TK

7874

.V56