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RecordNumber
23713
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Title
Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices
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Author Statement
edited by Orlando Auciello and Jurgen Engemann
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Publication
Kluwer Academic
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Publication Year
1993
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Collation
xv, 633 p. : ill. ; 25 cm
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Series
NATO ASI series. Series E, Applied sciences, vol. 234
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Notes
0792322657 , Includes bibliographical references and index , Proceeding of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies Bad Windsheim, Germany Se , Published in cooperation with NATO Scientific Affairs Division
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Subject
Thin films , Thin film devices
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ADDED ENTRIES
Engemann, Jurgen , Auciello, Orlando , , ,
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LC Class
TK
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LC Number
7872
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LC CutterNumber
.T55N38
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LC Date
1992
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Link To Document :
