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RecordNumber
24454
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Title
Introduction to VLSI process engineering
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Author Statement
edited by the Society of Chemical Engineers of Japan ; (editor in chief, Yuji Naka)
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Edition
English language ed
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Publication
Chapman & Hall
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Publication Year
1993
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Collation
xiii, 210 p. : ill. ; 24 cm
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Notes
0412395509 , Includes bibliographical references (p. (201)-204) and index , The English language edition has been translated from the original Japanese publication ... --T.p. verso
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Subject
Manufacturing processes , Integrated circuits - Very large scale integration
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ADDED ENTRIES
Naka, Yuji , ,
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LC Class
TK
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LC Number
7874
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LC CutterNumber
.I5957
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LC Date
1993
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نام فايل
IUST eb-117 -- eb117d15
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Link To Document :
