• RecordNumber
    24476
  • Author

    Bednar, B. , Bednar, B.

  • Title

    Resists in microlithography and printing

  • Author Statement
    Bohumil Bednar, Jaroslav Kralicek, and Jaromir Zachoval ; with contributions by Andrey V. Yelcov and
  • Edition
    2nd rev. ed
  • Publication
    Elsevier , Elsevier
  • Publication Year
    1993
  • Collation
    376 p. : ill. ; 25 cm
  • Series
    Materials science monographs, 76
  • Notes
    0444988467 , Includes bibliographical references and index , Translation of: Litograficke techniky
  • Subject

    Lithography, Electron beam , X-ray lithography , Microlithography , Integrated circuits - Very large scale integration , Semiconductors

  • ADDED ENTRIES
    Zachoval, Jaromir. , Kralicek, Jaroslav. , ,
  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .B3753
  • LC Date
    1993
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=24476&Field=0&DTC=2