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RecordNumber
25115
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Title
The Physics and chemistry of SiO2 and the Si-SiO2 interface 2
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Author Statement
edited by C. Robert Helms and Bruce E. Deal
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Publication
Plenum Press
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Publication Year
1993
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Collation
xvi, 503 p. : ill. ; 26 cm
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Notes
0306444194 , Includes bibliographical references and indexes , Proceedings of the Second Symposium on the Physics and Chemistry of the SiO2 and Si-SiO2 Interface, held May 18-21, 1992, in St. Louis, Missouri, spon
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Subject
Surfaces (Technology) , Surface chemistry , Silicon dioxide films , Dielectrics - Surfaces , Silica - Surfaces
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ADDED ENTRIES
Deal, Bruce E. , Helms, C. Robert. , , ,
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LC Class
QC
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LC Number
585.75
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LC CutterNumber
.S55P48
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LC Date
1993
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Link To Document :
