RecordNumber
25921
Author
Grill, Alfred
Title
Cold plasma in materials fabrication : from fundamentals to applications
Author Statement
Alfred Grill
Publication
Piscataway, NJ, New York IEEE Press, Institute of Electrical and Electronics Engineers
Publication Year
1994
Collation
xiii, 257p., ill.,tables
Notes
0780310551 , Includes bibliographical references and index
Subject
Manufacturing processes , Low temperature plasmas , Plasma engineering
LC Class
TA
LC Number
2020
LC CutterNumber
.G75
LC Date
1994