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RecordNumber
28684
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Title
Micro mechanical systems: principles and technology
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Author Statement
edited by T. Fukuda and W. Menz
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Publication
Elsevier Science
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Publication Year
1998
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Collation
viii, 268P., illus
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Series
Handbook of sensors and actuators; v.6
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Notes
0444823638 , Includes bibliographical references
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Subject
Microelectromechanical systems
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ADDED ENTRIES
Menz, Wolfgang , Fukuda, Toshio 1948 ed ,
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LC Class
TJ
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LC Number
163
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LC CutterNumber
.M48
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LC Date
1998
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وارد کنندة اطلاعات
محمدزاده
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Link To Document :
