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RecordNumber
29602
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Author
Hsu, Tai-Ran
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Title
MEMS and microsystems : design and manufacture
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Author Statement
Tai-Ran Hsu
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Publication
McGraw-Hill
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Publication Year
2002
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Collation
xii, 436 p. : ill. ; 24 cm
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Notes
Includes bibliographical references (p. 427-431) and index , 0072393912
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Subject
Microelectronics , Microelectromechanical systems , Microelectronic packaging
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LC Class
TK
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LC Number
7874
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LC CutterNumber
.H794
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LC Date
2002
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وارد کنندة اطلاعات
فراهاني
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Link To Document :
