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RecordNumber
29707
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Title
Micro process engineering : fundamentals, devices, fabrication, and applications
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Author Statement
volume editor : Norbert Kockmann
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Publication
Wiley-Vch
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Publication Year
2006
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Collation
xxii, 507 p. : illus
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Series
Advanced micro & nanosystems
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Notes
3527312463 , Includes bibliographical references and index
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Subject
Production engineering , Microtechnology
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ADDED ENTRIES
Kockmann, Norbert
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LC Class
TS
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LC Number
183
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LC CutterNumber
.M52
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LC Date
2006
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وارد کنندة اطلاعات
داوري
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Link To Document :
