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RecordNumber
33623
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Author
Lieberman, M. A. ( Michael A.) , Lieberman, M. A. ( Michael A.)
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Title
Principles of plasma discharges and materials processing
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Author Statement
Michael A. Lieberman, Allan J. Lichtenberg
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Publication
Wiley , Wiley
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Publication Year
1994
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Collation
xxvi, 572 p. : ill. ; 25 cm
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Notes
Includes bibliographical references (p. 559-564) and index , A Wiley-Interscience publication.
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Subject
Plasma dynamics , Thin films -- Surfaces , Plasma etching , Plasma chemistry
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ADDED ENTRIES
Lichtenberg, Allan J. ,
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LC Class
QC
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LC Number
718.5
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LC CutterNumber
.D9L54
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LC Date
1994
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وارد کنندة اطلاعات
كيهاني فر
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Link To Document :
