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RecordNumber
39848
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Title
MOEMS micro-opto-electro-mechanical systems
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SubTitle
micro-opto-electro-mechanical systems
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Author Statement
Manouchehr E. Motamedi, editor.
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Publication
SPIE Press
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Publication Year
c2005
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Collation
xxi, 614 p. ill. 26 cm
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Notes
Includes bibliographical references and index , 9788122428339
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Subject
Microelectromechanical systems. , Optoelectronic devices. , Microfabrication.
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ADDED ENTRIES
Motamedi, M. Edward.
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.M56
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LC Date
2005
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وارد کنندة اطلاعات
JALALIFAR
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تاريخ ورود اطلاعات
1389/3/1
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Link To Document :
