Low pressure plasmas and microstructuring technology

RecordNumber
40182
Author
Franz, Gerhard
Title
Low pressure plasmas and microstructuring technology
Author Statement
Gerhard Franz
Publication
Springer
Publication Year
2009
Collation
XXIV,732P.:ill.
Notes
ISBN:9783540858485
Biblography
Bibliography:P.669-703
Subject
Plasma (Ionized gases) , Plasma Engineering
LC Class
QC
LC Number
718
LC CutterNumber
.G47 L68
LC Date
2009
وارد کنندة اطلاعات
Zadehmohammadi
تاريخ ورود اطلاعات
1389/4/28
Link To Document :
http://dl.iust.ac.ir/dL/search/default.aspx?Term=40182&Field=0&DTC=2

Franz, Gerhard