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RecordNumber
41376
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Title
Micromechanics and MEMS : classic and seminal papers to 1990
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Author Statement
edited by William S. Trimmer
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Publication
IEEE Press
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Publication Year
1997
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Collation
xv, 701 p. ill
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Notes
"A selected reprint volume." , Includes bibliographical references and index , 0780310853
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Subject
Microelectronics. , Microelectromechanical systems. , Actuators.
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ADDED ENTRIES
AU Trimmer, W , AU Institute of Electrical and Electronics Engineers
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LC Class
TK
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LC Number
7874
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LC CutterNumber
.M4876
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LC Date
1997
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نام فايل
B629D7 -- IUST B629
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Link To Document :
