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RecordNumber
42830
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Title
Proceedings, IEEE, the thirteenth annual International Conference on Micro Electro Mechanical Systems : MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
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SubTitle
MEMS 2000 : Miyazaki, Japan, January 23-27, 2000
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Author Statement
sponsored by the IEEE Robotics and Automation Society in cooperation with the Micromachine Center Thirteenth annual International Conference on Micro Electro Mechanical systems , MEMS 2000 , 2000 IEEE Micro Electro Mechanical Systems , Micro Electro Mechanical Systems
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Publication
Piscataway N.J. Institute of Electrical and Electronics Engineers
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Publication Year
2000
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Collation
xlv, 810 p. : illus
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Notes
"IEEE Catalog Number: 00CH36308" , Includes bibliographical references and index
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Subject
Microelectromechanical systems
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ADDED ENTRIES
IEEE Robotics and Automation Society. , Micromachine Center (Japan)
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.I33
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LC Date
2000
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Link To Document :
