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RecordNumber
4922
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Author
Moreau, Wayne M
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Title
Semiconductor lithography : principles, practices, and materials
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Author Statement
Wayne M. Moreau
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Publication
Plenum Press
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Publication Year
1991, C.1988
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Collation
xx, 931 p. : ill. ; 26 cm
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Series
Microdevices
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Notes
0306421852 , Includes bibliographies and index
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Subject
Photoresists , Microlithography , Semiconductors
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LC Class
TK
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LC Number
7871.85
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LC CutterNumber
.M583
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LC Date
1988
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Link To Document :
