RecordNumber
5408
Author
Sivaram, S.
Title
Chemical Vapor deposition: thermal and plasma deposition of electronic materials
Author Statement
S. Sivaram
Publication
Van Nostrand Reinhold
Publication Year
1995
Collation
xii, 292P., illus
Notes
0442010796 , Includes bibliographical references
Subject
Microelectronics , Chemical Vapor deposition , Microelectronics industry
LC Class
TK
LC Number
7836
LC CutterNumber
.S54
LC Date
1995