• RecordNumber
    56641
  • Title

    CMOS-MEMS

  • Author Statement
    Oliver Brand; Gary Keith Fedder
  • Publication
    Weinheim Wiley-VCH
  • Publication Year
    2005
  • Series
    Advanced micro and nanosystems, 2.
  • Notes
    3527310800
  • Subject

    NANOTECHNOLOGY

  • LC Class
    T
  • LC Number
    174.7
  • LC CutterNumber
    .A344
  • LC Date
    2005
  • نام فايل
    B487d17
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=56641&Field=0&DTC=2