CMOS-MEMS

RecordNumber
56641
Title
CMOS-MEMS
Author Statement
Oliver Brand; Gary Keith Fedder
Publication
Weinheim Wiley-VCH
Publication Year
2005
Series
Advanced micro and nanosystems, 2.
Notes
3527310800
Subject
NANOTECHNOLOGY
LC Class
T
LC Number
174.7
LC CutterNumber
.A344
LC Date
2005
نام فايل
B487d17
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