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RecordNumber
58751
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Title
Advances in chemical mechanical planarization (CMP)
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Author Statement
edited by Suryadevara Babu
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Publication
Elsevier
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Publication Year
2016
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Collation
xxiii, 511 p. : illust
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Series
Woodhead Publishing series in electronic and optical materials no. 86.
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Notes
Includes bibliographical references and index , 9780081001653
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Subject
Chemical mechanical planarization , Nanoelectronics , Microelectronics , Chemical mechanical planarization , Microelectronics , Nanoelectronics
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ADDED ENTRIES
AU Babu, Suryadevara V., , SE Woodhead Publishing series in electronic and optical materials no. 86.
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LC Class
TK
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LC Number
7871.85
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LC CutterNumber
.A33
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LC Date
2016
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Link To Document :
