Advances in chemical mechanical planarization (CMP)

Author Statement

edited by Suryadevara Babu

Publication

Elsevier

Publication Year

2016

Collation

xxiii, 511 p. : illust

Series

Woodhead Publishing series in electronic and optical materials no. 86.

Notes

Includes bibliographical references and index , 9780081001653

Subject

Chemical mechanical planarization , Nanoelectronics , Microelectronics , Chemical mechanical planarization , Microelectronics , Nanoelectronics

ADDED ENTRIES

AU Babu, Suryadevara V., , SE Woodhead Publishing series in electronic and optical materials no. 86.

LC Class

LC Number

7871.85

LC CutterNumber

.A33

LC Date

2016

Link To Document