RecordNumber
58913
Author
Sarangan, Andrew
Title
Nanofabrication : principles to laboratory practice
Author Statement
Andrew Sarangan, University of Dayton, OH, USA
Publication
Boca Raton CRC Press, Taylor & Francis Group
Publication Year
2017
Collation
xv, 299 p.: ill
Series
Optical sciences and applications of light
Notes
Includes bibliographical references and index , 9781498725576
Subject
Nanolithography , Nanostructured materials Design and construction , Semiconductors Etching , Nanoelectronics Experiments
ADDED ENTRIES
TI
LC Class
TK
LC Number
7874.843
LC CutterNumber
.S27
LC Date
2017