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RecordNumber
6750
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Author
Graff, Klaus
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Title
Metal impurities in silicon-device fabrication
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Author Statement
Klaus Graff
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Edition
2nd. rev. ed
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Publication
Springer
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Publication Year
2000
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Collation
xv, 268 P., illus., tables
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Series
Springer series in materials science; 24
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Notes
3540642137 , Bibliography: P. 246-266
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Subject
Contamination (Technology) , Silicon , Silicon - Inclusions , Semiconductors
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ADDED ENTRIES
,
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LC Class
TK
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LC Number
7871.852
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LC CutterNumber
.G73
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LC Date
2000
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وارد کنندة اطلاعات
صادقي
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Link To Document :
