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RecordNumber
7342
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Author
Lieberman, M. A.
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Title
Principles of plasma discharges and materials processing
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Author Statement
Michael A. Lieberman, Allan J. Lichtenberg
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Edition
2nd ed
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Publication
Wiley
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Publication Year
2005
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Collation
xxxv, 757 p.: illus
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Notes
Includes bibliographical references (p. 735-748) , 0471720011
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Subject
Plasma dynamics. , Thin films -- Surfaces , Plasma chemistry -- Industrial applications
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ADDED ENTRIES
Lichtenberg, Allan J ,
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LC Class
QC
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LC Number
718.5
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LC CutterNumber
.D9L54
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LC Date
2005
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وارد کنندة اطلاعات
داوري
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Link To Document :
