چكيده به لاتين
In this thesis, design and simulation of a single-axial capacitive fully differential MEMS accelerometer based on surface micromachining with two proof masses is presented. So far, most surface micromachined capacitive accelerometers offered, employed differential interface circuits to measure capacitor variations. However, in the presented structure, the possibility of fully differential design is realized by dividing the proof mass into two masses. Two masses are electrically isolated from each other. But they are connected with an insulating layer from below. By utilizing two proof masses and altering outputs and stimulation voltage, parasitic capacitor is reduced and the sensitivity is increased. Moreover, some sensor capacitors are embedded inside the proof mass, so that sensitivity could be increased in the limited area and electrode length could be reduced. The sensor size is 1mm × 1mm and in this limited area, the mechanical and capacitive sensitivity of 30nm/g and 15.5fF/g, respectively.
