چكيده به لاتين
Today, chemical sensors have attracted a lot of attention toward biomedical, Pharmacy and Petrochemical Industries. Due to their performance and their structures, these sensors have different types and passive microwave sensor is one of them. Using frequency variations of different samples is the basic of performance of these sensors. One of the important parameters for evaluating sensors performance is their sensitivity to change in relative permittivity of fluids under tests. In this paper, as a novel approach, dual-detection microfluidic sensor based on corrugated metal-insulator-metal (MIM) ring resonator using spoof LSP waves, has been demonstrated. Furthermore, the dimensions are shrinked. Eventually, for sensitivity evaluation of these sensors, the prototype of our elaborately designed sensor was fabricated and tested. Two microfluidic channels are integrated with MIM ring resonator by the means of adhesive tape. We use DI-water and Dioxin in the diverse configuration to show the performance of our structure. Therefore, three fluids with very close relative permittivity are tested according to Dioxin, n-Hexane, Cyclohexane.
Keywords:
Chemical sensor, microfluidic microwave sensor, spoof localized surface plasmon, quarter-mode ring resonator.