• RecordNumber
    1026
  • Author

    Kamil A. valiev

  • Title

    The physics of submicron lithography

  • Publication
    Plenum Press
  • Publication Year
    1992
  • Collation
    496
  • ISBN
    0306435780
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=1026&Field=0&DTC=11