RecordNumber
15363
Title
Microprocesses and nanotechnology 2001 :2001 International Microprocesses and Nanotechnology Conference, October 31-November 2, 2001, Shimane, Japan : digest of papers
Author Statement
sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device
Publication
Business Center for Academic Societies Japan
Publication Year
2001
Collation
xxviii, 318 p. :ill
Notes
4891140178 , Includes bibliographical references and index
Subject
Microlithography , Microfabrication , Microtechnology , Nanotechnology , Microelectromechanical systems
ADDED ENTRIES
, ,
LC Class
TK
LC Number
7875
LC CutterNumber
.I585
LC Date
2001
وارد کنندة اطلاعات
كيهاني فر