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RecordNumber
15570
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Author
Lange, D.( Dirk)
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Title
CMOS cantilever sensor systems :atomic force microscopy and gas sensing applications
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Author Statement
D. Lange, O. Brand, H. Baltes
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Publication
Springer
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Publication Year
2002
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Collation
viii, 142 p. :ill.
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Series
Microtechnology and MEMS
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Notes
3540431438 , Includes bibliographical references (p. [131]-140) and index
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Subject
Gas detectors , Atomic force microscopy , Levers , Metal oxide semiconductors, Complementary , Microelectromechanical systems
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ADDED ENTRIES
Baltes, H.(Henry) , Brand, Oliver ,
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.L36
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LC Date
2002
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وارد کنندة اطلاعات
محمدي
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نام فايل
IUST B29 -- B29D9
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Link To Document :
