Enabling technology for MEMS and nanodevices

Author Statement

edited by H. Baltes ... [et al.]

Publication

Wiley-Vch

Publication Year

2004

Collation

xii, 427 p. : illus

Series

Advanced micro & nanosystems ;v. 1

Notes

Includes bibliographical references and index , 352730746X

Subject

Microelectromechanical systems , Microelectronics , Nanotechnology

ADDED ENTRIES

Baltes, H. (Henry)

LC Class

LC Number

7875

LC CutterNumber

.E53

LC Date

2004

وارد کنندة اطلاعات

داوري

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