RecordNumber
16844
Author
Valiev, Kamil A'Khmetovich
Title
The physics of submicron lithography
Author Statement
Kamil A. Valiev
Publication
New York Plenum Press
Publication Year
1992
Collation
xi, 493P., diagr
Series
Microdevices
Notes
Includes bibliographical references , ISBN: 0-0306-43578-0
Subject
Physics , Ion beam lithography , X-ray lithography , Lithography, Electron beam
LC Class
TK
LC Number
7874
LC CutterNumber
.V336
LC Date
1992