• RecordNumber
    16986
  • Author

    Jaeger, Richard C.

  • Title

    Introduction to microelectronic fabrication

  • Author Statement
    Richard C. Jaeger
  • Publication
    Addison-Wesley Pub. Co.
  • Publication Year
    1988
  • Collation
    xiii, 232 p. : ill. ; 24 cm
  • Series
    Modular series on solid state devices, v. 5
  • Notes
    Includes bibliographical references and index
  • Subject

    Integrated circuits - Very large scale integration

  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .J33
  • LC Date
    1988
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=16986&Field=0&DTC=2