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RecordNumber
16994
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Author
Ruska, W. Scot(Walter Scot)
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Title
Microelectronic processing : an introduction to the manufacture of integrated circuits
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Author Statement
W. Scot Ruska
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Publication
McGraw-Hill
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Publication Year
1987
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Collation
xviii, 430 p. : ill. ; 25 cm
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Series
McGraw-Hill series in electrical engineering
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Notes
Includes bibliographies and index
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Subject
Integrated circuits
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LC Class
TK
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LC Number
7874
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LC CutterNumber
.R87
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LC Date
1987
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Link To Document :
