Ruska, W. Scot(Walter Scot)

Title

Microelectronic processing : an introduction to the manufacture of integrated circuits

Name: Microelectronic processing : an introduction to the manufacture of integrated circuits
Author: Ruska, W. Scot(Walter Scot)

Author Statement

W. Scot Ruska

Publication

McGraw-Hill

Publication Year

1987

Collation

xviii, 430 p. : ill. ; 25 cm

Series

McGraw-Hill series in electrical engineering

Notes

Includes bibliographies and index

Subject

LC Class

LC Number

7874

LC CutterNumber

.R87

LC Date

1987

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