• RecordNumber
    17179
  • Author

    Brodie, Ivor.

  • Title

    The physics of micro/nano-fabrication

  • Author Statement
    Ivor Brodie and Julius J. Muray
  • Publication
    Plenum Press
  • Publication Year
    1992
  • Collation
    xix, 650 p. : ill
  • Series
    Microdevices
  • Notes
    0306441462 , Includes bibliographical references and indexes
  • Subject

    Thin-film circuits , Microelectronics

  • ADDED ENTRIES
    Muray, Julius J. ,
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .B725
  • LC Date
    1992
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=17179&Field=0&DTC=2