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RecordNumber
17179
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Author
Brodie, Ivor.
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Title
The physics of micro/nano-fabrication
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Author Statement
Ivor Brodie and Julius J. Muray
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Publication
Plenum Press
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Publication Year
1992
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Collation
xix, 650 p. : ill
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Series
Microdevices
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Notes
0306441462 , Includes bibliographical references and indexes
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Subject
Thin-film circuits , Microelectronics
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ADDED ENTRIES
Muray, Julius J. ,
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LC Class
TK
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LC Number
7874
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LC CutterNumber
.B725
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LC Date
1992
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Link To Document :
