High vacuum production in the microelectronics industry

RecordNumber
17838
Author
Duval, Pierre
Title
High vacuum production in the microelectronics industry
Author Statement
Pierre Duval
Publication
Elsevier
Publication Year
1988
Collation
Xiii, 222P., illus., diags., tables
Series
Plasma technology, 2
Notes
Bibliography:P. 163-167
Subject
Microelectronics , Vacuum - pumps , Vacuum technology
ADDED ENTRIES
,
LC Class
TJ
LC Number
940
LC CutterNumber
.D9
Link To Document :
http://dl.iust.ac.ir/dL/search/default.aspx?Term=17838&Field=0&DTC=2

Duval, Pierre