• RecordNumber
    17893
  • Author

    Simith, Bernard.

  • Title

    Ion implantation range data for silicon and germanium device technologies

  • Author Statement
    By Bernard Smith
  • Publication
    Learved Information
  • Publication Year
    1977
  • Collation
    Xviii (No paging) tables
  • Notes
    Bibliography:P. Xviii
  • Subject

    Semiconductors , Ion implantation

  • ADDED ENTRIES
    TI
  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .S65
  • LC Date
    1977