• RecordNumber
    18107
  • Author

    Brodie, Ivor.

  • Title

    The physics of microfabrication

  • Author Statement
    Ivor Brodie and Julius J. Muray
  • Publication
    Plenum Press
  • Publication Year
    1982
  • Collation
    xix, 503 p. : ill
  • Notes
    Includes bibliographical references and index
  • Subject

    Thin-film circuits , Microelectronics

  • ADDED ENTRIES
    Muray, Julius J. II. Title ,
  • LC Class
    TK
  • LC Number
    7874
  • LC CutterNumber
    .B73
  • LC Date
    1982
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=18107&Field=0&DTC=2