RecordNumber
18207
Author
Middleman, Stanley.
Title
Process engineering analysis in semiconductor device fabrication
Author Statement
Stanley Middleman, Arthur K. Hochberg
Publication
McGraw-Hill
Publication Year
1993
Collation
xvii, 774 p. : ill. ; 25 cm
Series
McGraw-Hill chemical engineering series
Notes
0070418535 , Includes bibliographical references and index
Subject
Semiconductors
ADDED ENTRIES
Hochberg, Arthur K. ,
LC Class
TK
LC Number
7871.85
LC CutterNumber
.M555
LC Date
1993