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RecordNumber
18207
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Author
Middleman, Stanley.
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Title
Process engineering analysis in semiconductor device fabrication
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Author Statement
Stanley Middleman, Arthur K. Hochberg
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Publication
McGraw-Hill
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Publication Year
1993
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Collation
xvii, 774 p. : ill. ; 25 cm
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Series
McGraw-Hill chemical engineering series
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Notes
0070418535 , Includes bibliographical references and index
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Subject
Semiconductors
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ADDED ENTRIES
Hochberg, Arthur K. ,
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LC Class
TK
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LC Number
7871.85
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LC CutterNumber
.M555
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LC Date
1993
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Link To Document :
