• RecordNumber
    18207
  • Author

    Middleman, Stanley.

  • Title

    Process engineering analysis in semiconductor device fabrication

  • Author Statement
    Stanley Middleman, Arthur K. Hochberg
  • Publication
    McGraw-Hill
  • Publication Year
    1993
  • Collation
    xvii, 774 p. : ill. ; 25 cm
  • Series
    McGraw-Hill chemical engineering series
  • Notes
    0070418535 , Includes bibliographical references and index
  • Subject

    Semiconductors

  • ADDED ENTRIES
    Hochberg, Arthur K. ,
  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .M555
  • LC Date
    1993