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RecordNumber
18255
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Title
IEEE micro electro mechanical systems : an investigations (sic) of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994
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Author Statement
sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems a
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Publication
Institute of Electrical and Electronics Engineers)
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Publication Year
1994
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Collation
xiv, 360 p. : ill. ; 30 cm
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Notes
078031834X , Includes bibliographical references and index , Title on spine: IEEE Micro Electro Mechanical Systems Workshop , IEEE catalog number 94CH3404-1. , IEEE Workshop on Micro Electro Mechanical Systems-- P. iii
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Subject
Actuators , Detectors , Microelectronics , Electromechanical devices
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ADDED ENTRIES
, , ,
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LC Class
TK
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LC Number
153
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LC CutterNumber
.I343
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LC Date
1994
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Link To Document :
