• RecordNumber
    18255
  • Title

    IEEE micro electro mechanical systems : an investigations (sic) of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994

  • Author Statement
    sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems a
  • Publication
    Institute of Electrical and Electronics Engineers)
  • Publication Year
    1994
  • Collation
    xiv, 360 p. : ill. ; 30 cm
  • Notes
    078031834X , Includes bibliographical references and index , Title on spine: IEEE Micro Electro Mechanical Systems Workshop , IEEE catalog number 94CH3404-1. , IEEE Workshop on Micro Electro Mechanical Systems-- P. iii
  • Subject

    Actuators , Detectors , Microelectronics , Electromechanical devices

  • ADDED ENTRIES
    , , ,
  • LC Class
    TK
  • LC Number
    153
  • LC CutterNumber
    .I343
  • LC Date
    1994
    • Link To Document
    https://dl.iust.ac.ir/dl/search/default.aspx?Term=18255&Field=0&DTC=2