• RecordNumber
    18281
  • Title

    Electron beam testing technology

  • Author Statement
    edited by John T.L. Thong
  • Publication
    Plenum Press
  • Publication Year
    1993
  • Collation
    xvi, 462 p. : ill. ; 26 cm
  • Series
    Microdevices
  • Notes
    0306443600 , Includes bibliographical references and index
  • Subject

    Scanning electron microscopes , Electron beams , Semiconductors

  • ADDED ENTRIES
    Thong, John T. L.
  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .E426
  • LC Date
    1993