RecordNumber
18281
Title
Electron beam testing technology
Author Statement
edited by John T.L. Thong
Publication
Plenum Press
Publication Year
1993
Collation
xvi, 462 p. : ill. ; 26 cm
Series
Microdevices
Notes
0306443600 , Includes bibliographical references and index
Subject
Scanning electron microscopes , Electron beams , Semiconductors
ADDED ENTRIES
Thong, John T. L.
LC Class
TK
LC Number
7871.85
LC CutterNumber
.E426
LC Date
1993