RecordNumber
19047
Author
Lyshevski,Sergey Edward
Title
MEMS and NEMS: systems, devices, and structures
Author Statement
Sergey Edward Lyshevski
Publication
CRC Press
Publication Year
2002
Collation
461P., illus
Notes
0849312620 , Includes bibliographical references
Subject
Microelectromechanical systems
LC Class
TK
LC Number
7875
LC CutterNumber
.L95
LC Date
2002
وارد کنندة اطلاعات
كريمي