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RecordNumber
19047
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Author
Lyshevski,Sergey Edward
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Title
MEMS and NEMS: systems, devices, and structures
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Author Statement
Sergey Edward Lyshevski
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Publication
CRC Press
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Publication Year
2002
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Collation
461P., illus
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Notes
0849312620 , Includes bibliographical references
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Subject
Microelectromechanical systems
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LC Class
TK
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LC Number
7875
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LC CutterNumber
.L95
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LC Date
2002
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وارد کنندة اطلاعات
كريمي
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Link To Document :
