• RecordNumber
    19047
  • Author

    Lyshevski,Sergey Edward

  • Title

    MEMS and NEMS: systems, devices, and structures

  • Author Statement
    Sergey Edward Lyshevski
  • Publication
    CRC Press
  • Publication Year
    2002
  • Collation
    461P., illus
  • Notes
    0849312620 , Includes bibliographical references
  • Subject

    Microelectromechanical systems

  • LC Class
    TK
  • LC Number
    7875
  • LC CutterNumber
    .L95
  • LC Date
    2002
  • وارد کنندة اطلاعات
    كريمي