RecordNumber
19115
Author
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (5th: 1994: Cambridge, Mass)
Title
IEEE/SEMI 1994 Advanced Semiconductor Manufacturing Conference and Workshop: theme, Manufacturing excellence: a global challenge: ASMC 94 proceedings, November 14-16, 1994, Cambridge, Massachusetts
Publication
Institute of Eletrical and Electronics Engineers
Publication Year
1994
Collation
vi, 335 p., illus
Notes
0780320530 , Includes bibliographical references
Subject
Process control , Production management , Semiconductors
LC Class
TK
LC Number
7871.85
LC CutterNumber
.I35
LC Date
1994
وارد کنندة اطلاعات
حسيني