• RecordNumber
    19115
  • Author

    IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (5th: 1994: Cambridge, Mass)

  • Title

    IEEE/SEMI 1994 Advanced Semiconductor Manufacturing Conference and Workshop: theme, Manufacturing excellence: a global challenge: ASMC 94 proceedings, November 14-16, 1994, Cambridge, Massachusetts

  • Publication
    Institute of Eletrical and Electronics Engineers
  • Publication Year
    1994
  • Collation
    vi, 335 p., illus
  • Notes
    0780320530 , Includes bibliographical references
  • Subject

    Process control , Production management , Semiconductors

  • LC Class
    TK
  • LC Number
    7871.85
  • LC CutterNumber
    .I35
  • LC Date
    1994
  • وارد کنندة اطلاعات
    حسيني