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RecordNumber
22630
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Author
Chapman, Brian N , Chapman, Brian N
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Title
Glow discharge processes : sputtering and plasma etching
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Author Statement
Brian Chapman
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Publication
Wiley , Wiley
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Publication Year
1980
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Collation
xv, 406 p. : ill. ; 24 cm
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Notes
Includes index , Bibliography: p. 397-400 , A Wiley-Interscience publication
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Subject
Plasma etching , Glow discharges , Sputtering (Physics)
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LC Class
QC
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LC Number
702.7
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LC CutterNumber
.P6C48
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Link To Document :
