RecordNumber
22630
Author
Chapman, Brian N , Chapman, Brian N
Title
Glow discharge processes : sputtering and plasma etching
Author Statement
Brian Chapman
Publication
Wiley , Wiley
Publication Year
1980
Collation
xv, 406 p. : ill. ; 24 cm
Notes
Includes index , Bibliography: p. 397-400 , A Wiley-Interscience publication
Subject
Plasma etching , Glow discharges , Sputtering (Physics)
LC Class
QC
LC Number
702.7
LC CutterNumber
.P6C48